Shama'il at-Tirmidhi 3

"When Allah’s Messenger (Allah bless him and give him peace) went to his mattress each night, he joined the palms of his hands, then breathed into them and recited into them: “Say: ‘He is Allah, One [qul Huwa'llahu Ahad]!' (Al-Qur'an;112:1), and: “Say: ‘I take refuge with the Lord of the Daybreak [qul a'udhu bi-Rabbil-falaq]!' (Al-Qur'an;113:1), and: “Say: ‘I take refuge with the Lord of humankind [qul a'udhu bi-Rabbi’n-nas]!' (Al-Qur'an;114:1), Then he passed them over as much of his body as he could, beginning with his head and his face and the front of his body, doing that three times.”